| PN | MF.H2.110 | MF.H2.170 | MF.H2.260 | MF.H2.300 | MF.H2.400 | MF.H2.500 |
| H2 flow rate | 110 cc/min | 170 cc/min | 260 cc/min | 300 cc/min | 400 cc/min | 500 cc/min |
| H2 purity | > 99.99999% , O2 < 0.1 ppm, dewpoint H2O < -75°C | |||||
| Delivery pressure | 1 - 11 bar (14 - 160 psi) | |||||
| Remarls | with auto-drying dessicant dryer | |||||